300 mm Semiconductor Wafer Handler

Robotic wafer handling has become a necessity in the closed environments used in advanced semiconductor wafer fabrication. Robotic handlers transfer and load/unload wafers within a cluster of processing tools.

Allied Motion supplies our HT and Megaflux brushless torque motors and our advanced motion controllers to the tool OEMs, who integrate them into their semiconductor processing tools for smooth and precise wafer handling and processing.